Introduction to Vacuum Technology

Introduction to Vacuum Technology

Copyright Year: 2023

Contributors: Hata, Brewer, and Louwagie

Publisher: Milne Open Textbooks

License: CC BY-NC-SA

Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology published in 2008, addresses basic topics in vacuum technology for individuals tasked with maintaining vacuum systems and instructors teaching technician-level courses. The topics are carefully curated to the needs of technicians in a production environment and the types of vacuum systems used, and the accompanying laboratory manual and instructor’s guide support the delivery of lecture-laboratory courses.

Introduction to Vacuum Technology

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